왜 xps si 2p을 보나요

Silicon (100) substrates are ubiquitous in microfabrication and, accordingly, their surface characteristics are important. Herein, we report the analysis of Si (100) via X-ray photoelectron spectroscopy (XPS) using monochromatic Al Kα radiation. Survey scans show that the material is primarily silicon and oxygen with small amounts of carbon, nitrogen, and fluorine contamination. The Si 2p region shows two peaks that correspond to elemental silicon and silicon dioxide. Using these peaks the thickness of the native oxide (SiO2) is estimated using the equation of Strohmeier. The oxygen peak is symmetric. These silicon wafers are used as the substrate for subsequent growth of templated carbon nanotubes in the preparation of microfabricated thin layer chromatography plates.

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X-ray photoelectron spectroscopy for detection of the different Si-O bonding states of silicon
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ACKNOWLEDGMENTS

We thank Diamond Analytics, a US Synthetic company (Orem, UT), for funding this study. Part of this research was performed at EMSL, a national scientific user facility sponsored by the Department of Energy's Office of Biological and Environmental Research and located at Pacific Northwest National Laboratory.

. 2003 Apr;375(8):1276-81.

doi: 10.1007/s00216-003-1811-7. Epub 2003 Mar 28.

Affiliations

PMID: 12733050
DOI: 10.1007/s00216-003-1811-7

X-ray photoelectron spectroscopy for detection of the different Si-O bonding states of silicon

Dieter Pleul et al. Anal Bioanal Chem. 2003 Apr.

Abstract

X-ray photoelectron spectroscopy (XPS) was used to detect the bonding between a silica particle surface and attached silanes. In addition to the commonly recorded Si 2p spectrum, the Si 1 s level is also accessible when monochromatic Ag Lalpha X-rays are applied. Furthermore, the spectrum of the Si 1 s level shows a fine structure. After spectrum deconvolution, we assigned the fitted spectral peaks to Si-C bonds of the silanes and to the Si-O bonds of the silica network. The recorded Si 1 s spectra were deconvoluted into peaks originating from Si-C bonds and the Si-O-Si silica network. To check the results of spectrum deconvolution, several differently functionalized silanes containing stoichiometric amounts of heteroatoms were applied for silica surface modification. We conclude that spectra deconvolution of the Si 1 s signal is an appropriate means for quantification of surface attached silane molecules.

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